Fabrication and Structural and Optical Properties of Amorphous Si/SiO2 Superlattices on (100) Si
- 著者名:
- 掲載資料名:
- Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 382
- 発行年:
- 1995
- 開始ページ:
- 259
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992856 [1558992855]
- 言語:
- 英語
- 請求記号:
- M23500/382
- 資料種別:
- 国際会議録
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6
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Amorphous Silicon Films And Superlattices Grown By Molecular Beam Epitaxy: An Optical Analysis
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