Ion Assisted Reaction in Polymer and Ceramics
- 著者名:
- 掲載資料名:
- Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 504
- 発行年:
- 1999
- 開始ページ:
- 431
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994096 [1558994092]
- 言語:
- 英語
- 請求記号:
- M23500/504
- 資料種別:
- 国際会議録
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Enhancement of Adhesion Between Cu Thin Film and Polyimide Modified by Ion Assisted Reaction
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