EPITAXIAL GROWTH OF CoSi2/Si HETERO-STRUCTURE BY SOLID STATE INTERACTION OF Co/Ti/Si MULTILAYER
- 著者名:
Li, Bing-Zong Wu, Wei-Jun Shao, Kai Gu, Zhi-Guang Jiang, Guo-Bao Huang, Wei-Ning Fang, Hua Sun, Zhen Lu, Ping Zhou, Zu-Yao - 掲載資料名:
- Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 337
- 発行年:
- 1994
- 開始ページ:
- 449
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992375 [1558992375]
- 言語:
- 英語
- 請求記号:
- M23500/337
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
Editorial department of International journal of minerals, metallurgy and materials |
MRS - Materials Research Society |
Trans Tech Publications |
MRS-Materials Research Society |
Editorial Office of Trans. NFsoc., Central-South University of Technology |
Society of Photo-optical Instrumentation Engineers |
10
国際会議録
Study on Preparation and Photocatalytic Activity of Nano-TiO2/Precipitated Silica Composite Material
Trans Tech Publications |
5
国際会議録
Effects of Roughness Strip and Acoustic Sensor Height on Subsonic Boundary Layer by Experiment
Trans Tech Publications |
Trans Tech Publications |
Electrochemical Society |
Trans Tech Publications |