Blank Cover Image

COMPARATIVE Cu DIFFUSION STUDIES IN ADVANCED METALLIZATIONS OF Cu AND Al-Cu BASED THIN FILMS

著者名:
Gupta, D.  
掲載資料名:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
337
発行年:
1994
開始ページ:
209
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
言語:
英語
請求記号:
M23500/337
資料種別:
国際会議録

類似資料:

1 国際会議録 *SPECIAL ASPECTS OF DIFFUSION IN METALLIC THIN FILMS

Gupta, D.

Materials Research Society
7 国際会議録 Chemical Vapor Deposition of Cr-Based Thin Films as Diffusion Barriers in Copper Metallization

Maury, F., Gasqueres, C., Duminica, F.-D., Ossola, F.

Trans Tech Publications
2 国際会議録 Special Aspects of Diffusion in Polycrystalline and Amorphous Metallic Thin Films at Low Temperatures

Gupta,D.

Trans Tech Publications
8 国際会議録 Electromigration and Diffusion in Pure Cu and Cu(Sn) Alloys

Hu, C.-K., Lee, K. L., Gupta, D., Blauner, P.

MRS - Materials Research Society
3 国際会議録 A COMPARATIVE STUDY OF ELECTRON BEAM DEPOSITED AND SPUTTERED 7059 CORNING GLASS THIN FILMS FOR WAVEGUIDES

Gupta, Mool C.

Materials Research Society
9 国際会議録 Electromigration and Diffusion in Pure Cu and Cu(Sn) Alloys

Hu, C-K., Lee, K. L., Gupta, D., Blauner, P.

MRS - Materials Research Society
4 国際会議録 Calorimetric Study of the Energetics and Kinetics of Interdiffusion in Cu/Cu6Sn5 Thin Film Diffusion Couples

Neils, W. K., Chromik, R. R., Dreyer, K. F., Grosman, D., Cotts, E. J.

MRS - Materials Research Society
10 国際会議録 Diffusion Characteristics of Cu in TiN hin Films

Gupta, Abhishek, Wang, Hiyan, Kvit, Alex V., Duscher, Gerd, Narayan, Jay

Materials Research Society
5 国際会議録 Ultra-Thin TaN Films as Diffusion Barriers for Cu Metallization

Huang, Sharon S., Tu, K. N., Sun, Bingxi

MRS - Materials Research Society
11 国際会議録 A comparative study between high and low temperature thermally controlled crystallization of thin films

Robinson, Richard D., Miaoulis, Ioannis N.

MRS - Materials Research Society
6 国際会議録 CVD AND CHARACTERIZATION OF OF AL-Cu METALLIZATION THIN FILMS

Houlding, V. H., Maxwell Jr., H., Crochietre, S. M., Farrington, D. L., Rai, R. S., Targaglia, J. M

Materials Research Society
12 国際会議録 A COMPARATIVE STUDY OF THIN-FILM AND BULK REACTION KINETICS AND DIFFUSION PATH: THE Ir/GaAs SYSTEM

Schulz, Kevin J., Chang, Austin Y.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12