Anodic bonding technique for silicon-to-ITO coated glass bonding
- 著者名:
- Choi,W.-B. ( Korea Institute of Science and Technology )
- Ju,B.-K.
- Lee,Y.-H.
- Oh,M.-H.
- Sung,M.-Y.
- 掲載資料名:
- Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3046
- 発行年:
- 1997
- 開始ページ:
- 336
- 終了ページ:
- 341
- 出版情報:
- Bellingham: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424594 [0819424595]
- 言語:
- 英語
- 請求記号:
- P63600/3046
- 資料種別:
- 国際会議録
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