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Overview of micromachined platforms for thermal sensing and gas detection

著者名:
掲載資料名:
Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3046
発行年:
1997
開始ページ:
273
終了ページ:
284
出版情報:
Bellingham: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424594 [0819424595]
言語:
英語
請求記号:
P63600/3046
資料種別:
国際会議録

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