Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement units
- 著者名:
- Smith,J.H. ( Sandia National Labs. )
- Montague,S.
- Allen,J.J.
- Ellis,J.R.
- Burgett,S.M.
- 掲載資料名:
- Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3046
- 発行年:
- 1997
- 開始ページ:
- 242
- 終了ページ:
- 247
- 出版情報:
- Bellingham: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424594 [0819424595]
- 言語:
- 英語
- 請求記号:
- P63600/3046
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Automotive Engineers |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |