Optical properties of thin films deposited by reactive-Rf-magnetron sputtering
- 著者名:
Yoshida,K. ( Osaka Institute of Technology ) Kamimura,T. Ochi,K. Kaku,S. Yoshida,H. Fujita,H. Tani,F. Sunagawa,M. Okamoto,T. - 掲載資料名:
- Laser-Induced Damage in Optical Materials: 1996
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2966
- 発行年:
- 1997
- 開始ページ:
- 225
- 終了ページ:
- 225
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819423702 [081942370X]
- 言語:
- 英語
- 請求記号:
- P63600/2966
- 資料種別:
- 国際会議録
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