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SOG etch-back process induced surface roughness

著者名:
Chu,P.-T. ( Taiwan Semiconductor Manufacturing Co. )
Chen,S.-F.
Wu,J.-S.
Hung,C.-C.
Lin,T.-H.
Chao,Y.-C.
さらに 1 件
掲載資料名:
Microelectronic Device and Multilevel Interconnection Technology II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2875
発行年:
1996
開始ページ:
285
終了ページ:
292
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422736 [0819422738]
言語:
英語
請求記号:
P63600/2875
資料種別:
国際会議録

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