Study of integration issues in shallow trench isolation for deep submicron CMOS technologies
- 著者名:
Chatterjee,A. ( Texas Instruments Inc. ) Mason,M.E. Joyner,K. Rogers,D. Mercer,D. Kuehne,J. Esquivel,A.L. Mei,P. Murtaza,S.S. Taylor,K.J. Ali,I. Nag,S. O'Brien,S. Ashburn,S. - 掲載資料名:
- Microelectronic Device and Multilevel Interconnection Technology II
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2875
- 発行年:
- 1996
- 開始ページ:
- 39
- 終了ページ:
- 47
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422736 [0819422738]
- 言語:
- 英語
- 請求記号:
- P63600/2875
- 資料種別:
- 国際会議録
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Electrochemical Society |
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Electrochemical Society |
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |