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New electron-beam mask-writing system for 0.25-ヲフm lithography

著者名:
Satoh,H. ( Hitachi Central Research Lab. )
Someda,Y.
Saitou,N.
Kawasaki,K.
Itoh,H.
Mizuno,K.
さらに 1 件
掲載資料名:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2723
発行年:
1996
開始ページ:
102
終了ページ:
111
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420992 [0819420999]
言語:
英語
請求記号:
P63600/2723
資料種別:
国際会議録

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