Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging

Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging

著者名:

Stevie,F.A.

掲載資料名:

Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3322

発行年:

1997

開始ページ:

357

終了ページ:

364

出版情報:

Pennington, NJ: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427656 [0819427659]

言語:

英語

請求記号:

P63600/3322

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018778
シリーズID:	PA00000029
会議名:	Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
回次:	1997
会議開催地:	Montréal, QC, Canada
会議開催年:	1997.05.06-1997.05.08

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5 国際会議録 Real-time preparation-free imaging of mobile charge in SiO2 Jastrzebski,L., Edelman,P., Lagowski,J.J., Hoff,A.M., Savchouk,A., Persson,E. SPIE-The International Society for Optical Engineering	11 国際会議録 A Novel Method for Studying Degradation Related to Plasma Processing of Silicon Wafers Lagowski, J., Hoff, A., Jastrzebski, L., Edelman, P., Esry, T. MRS - Materials Research Society
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