Silicon on Insulator Characterization Techniques and Results*

Silicon on Insulator Characterization Techniques and Results*

著者名:: Wetteroth,T.
掲載資料名:: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 3322
発行年:: 1997
開始ページ:: 177
終了ページ:: 186
出版情報:: Pennington, NJ: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819427656 [0819427659]
言語:: 英語
請求記号:: P63600/3322
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00018778
シリーズID:	PA00000029
会議名:	Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
回次:	1997
会議開催地:	Montréal, QC, Canada
会議開催年:	1997.05.06-1997.05.08

類似資料:

1 国際会議録 Silicon on Insulator Characterization Techniques and Results Wetteroth, T. Electrochemical Society	7 国際会議録 Far- and near-field characterization of a photonic-crystal-based microcavity on silicon-on-insulator Cluzel, B., Gerard, D., Picard, E., Charvolin, T., Calvo, V., Hadji, E., de Fornel, F. SPIE - The International Society of Optical Engineering
2 国際会議録 Residual stress in C54 Ti disilicide formed in silicon on insulator Chen, C, Tn, K N, Wetteroth, T, Wilson, S R Electrochemical Society	8 国際会議録 Silicon-Framed Tensile Specimens: Techniques and Results Read, D. T. MRS - Materials Research Society
3 国際会議録 Characterization of the Activation-Relaxation technique: Recent Results on Models of Amorphous Silicon Malek, Rachid, Mousseau, Normand, Barkema, G.T. Materials Research Society	9 国際会議録 Characterization of integrated Bragg gratings on silicon-on-insulator rib waveguides Chan, S.P., Passaro, V.M.N., Lim, S.T., Png, C.E., Headley, W., Masanovic, G., Reed, Graham T., Atta, R.M.H., Ensell, … SPIE - The International Society of Optical Engineering
4 国際会議録 Optical Characterization of Silicon-on-Insulator Li, G. G., Forouhi, A. R., Bloomer, I., Auberton-Herve, A., Wittkower, A. MRS - Materials Research Society	10 国際会議録 Characterization of interfaces in silicon-on-insulator structure Kang, S.G., Ryoo, K., Kim, H.R., Seo, G., Lee, S.H., Kim, D.S., Hong, P.Y Electrochemical Society
5 国際会議録 CHARACTERIZATION OF THIN-FILM BESOI USING A CVD Si1x-y-Gex-By ETCH STOP Desmond, C.A., Hunt, C.E., Wetteroth, T. Electrochemical Society	11 国際会議録 PHOTOREFLECTANCE CHARACTERIZATION OF SILICON FILMS ON INSULATOR Giordana, Adraina, Glosser, R., Pellegrino, Joseph G., Qadri, S., Twigg, M. E., Richmond, E. D., Joyner, Keith, Pollack, … Materials Research Society
6 国際会議録 CHARACTERIZATION OF DIRECTLY BONDED SILICON-ON-INSULATOR STRUCTURES USING SPECTROSCOPIC ELLIPSOMETRY T. Saitoh, M.E. El-Ghazzawi, T. Oka, N. Natsuaki Electrochemical Society	12 国際会議録 Strained Silicon-On-Insulator - Fabrication and Characterization M. Reiche, C. Himcinschi, U. Gösele, S. Christiansen, S. Mantl, D. Buca, Q. Zhao, S. Feste, R. Loo, D. Nguyen, W. … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12