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Microfabricated silicon gas chromatographic microchannels: fabrication and performance

著者名:
Matzke,C.M. ( Sandia National Labs. )
Kottenstette,R.J. ( Sandia National Labs. )
Casalnuovo,S.A. ( Sandia National Labs. )
Frye-Mason,G.C. ( Sandia National Labs. )
Hudson,M.L. ( Sandia National Labs. )
Sasaki,D.Y. ( Sandia National Labs. )
Manginell,R.P. ( Sandia National Labs. )
Wong,C.C. ( Sandia National Labs. )
さらに 3 件
掲載資料名:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3511
発行年:
1998
開始ページ:
262
終了ページ:
268
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
言語:
英語
請求記号:
P63600/3511
資料種別:
国際会議録

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