Uniform and simultaneous fabrication of high-precision and high-density orifice,channel,and reservoirs for ink-jet printheads
- 著者名:
- Yoon,J.-B. ( Korea Advanced Institute of Science and Technology )
- Lee,J.-D. ( Korea Advanced Institute of Science and Technology )
- Han,C.-H. ( Korea Advanced Institute of Science and Technology )
- Yoon,E. ( Korea Advanced Institute of Science and Technology )
- Kim,C.-K. ( Korea Advanced Institute of Science and Technology )
- 掲載資料名:
- Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3511
- 発行年:
- 1998
- 開始ページ:
- 214
- 終了ページ:
- 224
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429704 [0819429708]
- 言語:
- 英語
- 請求記号:
- P63600/3511
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
2
国際会議録
Novel and high-yield fabrication of electroplated 30 microcoils for MEMS and microelectronics
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
国際会議録
Fabrication of a Single Crystal Silicon Substrate for AM-LCD Using Vertical Etching of (110) Silicon
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |