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Transient heating with graphite heaters for semiconductor processing

著者名:
  • Fan, John C.C. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Tsaur, B-Y. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Geis, M.W. ( Lincoln Laboratory, Massachusetts Institute of Technology )
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
751
終了ページ:
758
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

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Tsaur, B-Y., Geis, M.W., Fan, John C.C., Silversmith, D.J., Mountain, R.W.

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SPIE-The International Society for Optical Engineering

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