Blank Cover Image

Silicon-on-insulator mosfets fabricated in zone-melting-recrystallized poly-Si films on SiO2

著者名:
  • Tsaur, B-Y. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Geis, M.W. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Fan, John C.C. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Silversmith, D.J. ( Lincoln Laboratory, Massachusetts Institute of Technology )
  • Mountain, R.W. ( Lincoln Laboratory, Massachusetts Institute of Technology )
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
585
終了ページ:
590
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

類似資料:

1 国際会議録 *ELECTRICAL CHARACTERISTICS AND DEVICE APPLICATIONS OF ZONE-MELTING-RECRYSTALLIZED Si FILMS ON SiO2

Tsaur, B. -Y., Fan, J. C. C., Geis, M. W., Chapman, R. L., Brueck, S. R. J., Silversmith, D. J., Mountain, R. W.

North-Holland
7 国際会議録 THE ROLE OF OXYGEN IN ZONE-MELTING RECRYSTALLTZATION OF SILICON-ON-INSULATORS FILMS

Fan, C. C., Tsaur, B-., Chen, C. K., Dick, J. R., Kazmerzki, L. L.

North-Holland
2 国際会議録 ELIMINATION OF SUBBOUNDARIES FROM ZONE-MELTING-RECRYSTALLIZED SILICON-ON-INSULATOR FILMS

Geis, M.W., Chen, C.K., Smith, H.I., Nitishin, P.M., Tsaur, B-Y., Mountain, R.W.

Materials Research Society
8 国際会議録 Transient heating with graphite heaters for semiconductor processing

Fan, John C.C., Tsaur, B-Y., Geis, M.W.

North Holland
3 国際会議録 CAPPING TECHNIQUES FOR ZONE-MELTING-RECRYSTALLIZED Si-ON-INSULATOR FILMS

Chen, C.K., Pfeiffer, L., West, K.W., Geis, M.W., Darack, S., Achaibar, G., Mountain, R.W., Tsaur, B-Y.

Materials Research Society
9 国際会議録 LIQUID-SOLID INTERFACE MORPHOLOGIES AND DEFECT STRUCTURES IN ZONE-MELTING-RECRYSTALLIZED SILICON-ON-INSULATOR FILMS

Im, J. S., Chen, C. K., Thompson, C. V., Geis, M. W., Tomita, H.

Materials Research Society
4 国際会議録 *ZONE MELTING RECRYSTALLIZATION OF SEMICONDUCTOR FILMS

Ceis, M. W., Smith, H. I., Tsaur, B.-Y., Fan, J. C. C., Silversmith, D. J., Mountain, R. W., Chapman, R. K.

North-Holland
10 国際会議録 * THERMAL STRESS DURING ZONE-MELTING-RECRYSTALLIZATION OF SILICON ON INSULATOR FILMS: THE ORIGIN OF SUBBOUNDARIES AND IN-PLANE ORIENTATION OF SOI

Gibson, J.M., Pfeiffer, L.N., West, K.W., Joy, D.C.

Materials Research Society
5 テクニカルペーパー High-Quality Silicon Films Prepared by Zone-Melting Recrystallization

Chen, C. K., Geis, M. W., Tsaur, B-Y, Fan, C. C.

National Aeronautics and Space Administration
11 国際会議録 *ZONE MELTING RECRYSTALLIZATION OF PATTERNED FILMS AND LOW- TEMPERATURE GRAPHOEPITAXY

Smith, H. I., Thompson, C. V., Geis, M. W., Atwater, H. A., Yonehara, T., Wong, C. C.

North-Holland
6 国際会議録 RECENT ADVANCES IN Si AND Ge ZONE-MELTING RECRYSTALLIZATION

Chen, C. K., Geis, M. W., Choi, H. K., Tsaur, B-Y., Fan, J. C. C.

Materials Research Society
12 国際会議録 * CRYSTALLINE FILMS ON AMORPHOUS SUBSTRATES BY ZONE MELTING AND SURFACE-ENERGY-DRIVEN GRAIN GROWTH IN CONJUNCTION WITH PATTERNING

Smith, H.I., Geis, M.W., Thompson, C.V., Chen, C.K.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12