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Fast scanned energy beam induced explosive crystallization of ion implantation amorphized poly and single crystal silicon substrates

著者名:
Lerme, M. ( CNET )
D'Ouville, T. Ternisien ( CNET )
Vu, Duy-Phack ( CNET )
Perio, A. ( CNET )
Rozgonyi, G.A. ( CNET )
Nguyen, V.T. ( CNET )
さらに 1 件
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
547
終了ページ:
552
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

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