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PASSIVE INTEGRATION PROCESS ON STANDARD AND HIGH RESISTIVITY SILICON

著者名:
掲載資料名:
1999 International Conference on High Density Packaging and MCMs : 6-9 April 1999, The Adam's Mark Hotel, Denver, Colorado
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3830
発行年:
1999
開始ページ:
194
終了ページ:
199
出版情報:
Reston, VA: IMAPS
ISSN:
0277786X
ISBN:
9780930815578 [0930815572]
言語:
英語
請求記号:
P63600/3830
資料種別:
国際会議録

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