Zone-plate array lithography(ZPAL):a new maskless approach

Zone-plate array lithography(ZPAL):a new maskless approach

著者名:

Carter,D.J.D. ( Massachusetts Institute of Technology )
Gil,D.
Menon,R.
Djomehri,I.J.
Smith,H.L.

掲載資料名:

Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3676

発行年:

1999

巻:

Part1

開始ページ:

324

終了ページ:

332

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431509 [0819431508]

言語:

英語

請求記号:

P63600/3676

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018541
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Emerging lithographic technologies
回次:	1999 : 3rd
会議開催地:	Santa Clara, CA, USA
会議開催年:	1999.03.15-1999.03.17

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1 国際会議録 Zone-plate-array lithography (ZPL): a maskless fast-turn-around system for microoptic device fabrication (Invited Paper) Menon, R., Gil, D., Carter, D.J.D., Patel, A., Smith, H.I. SPIE-The International Society for Optical Engineering	7 国際会議録 Dynamic Maskless Holographic Lithography Nathan J. Jenness, Kurt D. Wulff, Matthew S. Johannes, Daniel G. Cole, Robert L. Clark American Society of Mechanical Engineers
2 国際会議録 Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning Rettig, C. L., Khodykin, O. V., Hoffman, J. R., Marx, W. F., Bowering, N. R., Vargas, E., Ershov, A. I., Fomenkov, I. … SPIE - The International Society of Optical Engineering	8 国際会議録 Two-dimensional MEMS array for maskless lithography and wavefront modulation D. Lopez, V. A. Aksyuk, G. P. Watson, W. M. Mansfield, R. Cirelli, F. Klemens, F. Pardo, E. Ferry, J. Miner, T. W. … SPIE - The International Society of Optical Engineering
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