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Process technologies of MPACVD planar waveguide devices and fiber attachment

著者名:
掲載資料名:
Silicon-based optoelectronics : 27-28 January 1999, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3630
発行年:
1999
開始ページ:
2
終了ページ:
8
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431004 [0819431001]
言語:
英語
請求記号:
P63600/3630
資料種別:
国際会議録

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