Process technologies of MPACVD planar waveguide devices and fiber attachment
- 著者名:
- Li,C. ( AMP,Inc. )
- Qian,F.
- Boudreau,R.A.
- Rowlette,J.R.
- Bowen,T.P.
- 掲載資料名:
- Silicon-based optoelectronics : 27-28 January 1999, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3630
- 発行年:
- 1999
- 開始ページ:
- 2
- 終了ページ:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431004 [0819431001]
- 言語:
- 英語
- 請求記号:
- P63600/3630
- 資料種別:
- 国際会議録
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9
国際会議録
Fiber-to-waveguide evanescent coupler for planar integration of silicon optoelectronic devices
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