New approach to the focus exposure matrix(FEM)sample measurement using CD-SEM
- 著者名:
- Morokuma,H. ( Hitachi,Ltd. )
- Yamaguchi,S.
- Maeda,T.
- Iizumi,T.
- Ueda,K.
- 掲載資料名:
- Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3998
- 発行年:
- 2000
- 開始ページ:
- 829
- 終了ページ:
- 837
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436160 [081943616X]
- 言語:
- 英語
- 請求記号:
- P63600/3998
- 資料種別:
- 国際会議録
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