AlN thin films prepared by reactive ion beam coating
- 著者名:
Cheng, L. L. Yu, Y. H. Sundaravel, B. Luo, E. Z. Lin, S. Lei, Y. M. Ren. C. X. Cheung, W. Y. Wong, S. P. Xu, J. B. Wilson, I. H. - 掲載資料名:
- Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 585
- 発行年:
- 2000
- 開始ページ:
- 251
- 出版情報:
- Warrendale, Pa.: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994935 [1558994939]
- 言語:
- 英語
- 請求記号:
- M23500/585
- 資料種別:
- 国際会議録
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