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Etching and surface smoothing with gas-cluster ion beams

著者名:
Fenner, D. B.
Torti, R. P.
Allen, L. P.
Toyoda, N.
Kirkpatrick, A. R.
Greer, J. A.
DiFilippo, V.
Hautala, J.
さらに 3 件
掲載資料名:
Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
585
発行年:
2000
開始ページ:
27
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994935 [1558994939]
言語:
英語
請求記号:
M23500/585
資料種別:
国際会議録

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