Device and Fabrication Issues of High-Performance Si/SiGe FETS
- 著者名:
- 掲載資料名:
- Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 533
- 発行年:
- 1998
- 開始ページ:
- 83
- 出版情報:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994393 [1558994394]
- 言語:
- 英語
- 請求記号:
- M23500/533
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
3
国際会議録
Analysis of SiGe FET Device Structures on Silicon-on-Sapphire Substrates by X-ray Diffraction
MRS - Materials Research Society |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
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Materials Research Society |
Trans Tech Publications |