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A Study of Substrate Orientation Dependence of the Solid-Phase Epitaxial Growth of Amorphized GaAs

著者名:
掲載資料名:
Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
523
発行年:
1998
開始ページ:
201
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994294 [1558994297]
言語:
英語
請求記号:
M23500/523
資料種別:
国際会議録

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