Correlation Between In situ Optical Emission Spectroscopy in a Reactive O2/Ar rf Magnetron Sputtering Discharge and PZT Thin Film Composition
- 著者名:
- 掲載資料名:
- Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 493
- 発行年:
- 1998
- 開始ページ:
- 333
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993983 [1558993983]
- 言語:
- 英語
- 請求記号:
- M23500/493
- 資料種別:
- 国際会議録
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