Blank Cover Image

Oxygen-Induced Inhibition of Noble Metal Silicide Formation: Implications for Electrode/Barrier Structures Used With Perovskite Materials

著者名:
掲載資料名:
Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
493
発行年:
1998
開始ページ:
143
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993983 [1558993983]
言語:
英語
請求記号:
M23500/493
資料種別:
国際会議録

類似資料:

1 国際会議録 Stability and Oxidation Behavior of Ir Thin Film Electrodes on Si and SiO2

Saenger, K. L., Grill, A., Shaw, T. M., Neumayer, D. A., Lin, C., Wang, Y. Y.

MRS - Materials Research Society
7 国際会議録 Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide

Lavoie, C., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E., Jordan-Sweet, J., Saenger, K. L., Doany, F.

MRS - Materials Research Society
2 国際会議録 Electrode Structures for Integration of Ferroelectric or High Dielectric Constant Films in Semiconductor Devices

Grill, A.

MRS - Materials Research Society
8 国際会議録 Oxygen Vacancy Formation in LaCrO3 Base Perovskites

Boroomand, F., Wessel, E., Singheiser, L., Hilpert, K.

Electrochemical Society
3 国際会議録 Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI

Grill, A., Patel, V., Saenger, K. L., Jahnes, C., Cohen, S. A., Schrott, A. G., Edelstein, D. C., Paraszczak, J. R.

MRS - Materials Research Society
9 国際会議録 Effect of nitrogen and oxygen impurities on tantalum silicide formation

Ho, K. T., Lien, C-D., Nicolet,M-A., Scott, D. M.

North-Holland
4 国際会議録 *Properties and decomposition behaviors of reactively sputtered Pt(O) electrode materials

Saenger, K. L., Rossnagel, S. M.

MRS-Materials Research Society
10 国際会議録 Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition

Neumayer, Deborah A., Saenger, Katherine L., Laibowitz, Robert B., Shaw, Thomas M., Mih, Rebecca, Grill, Alfred

MRS-Materials Research Society
5 国際会議録 Electrodes and Barriers for DRAM and FERAM: Processing, Integration, and Fundamentals

Saenger, K.L., Andricacos, P.C., Athavale, S.D., Baniecki, J.D., Cabral, C., Jr., Costrini, G., Kwietniak, K.T., …

Materials Research Society
11 国際会議録 Oxide Barriers to the Formation of Refractory Silicides

Silversmith, D. J., Rathman, D. D., Mountain, R. W.

North-Holland
6 国際会議録 Behavior and influence of oxygen in chromium silicide formation

Lien, C.-D., Wielu-ski, L., Nicolet, M.-A., Stika, K. M

North-Holland
12 国際会議録 Effect of Oxygen on the Degradation of Ti-Si-N Diffusion Barriers in Cu Metallization

McArthur, W. F., Ring, K. M., Morgan, B., Hurst, Q., Serber, D., Clark, A., Kavanagh, K. L.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12