Microstructure Control of (Ba,Sr)TiO3 Films for Gigabit DRAM | 東京工業大学附属図書館文献データベース

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Microstructure Control of (Ba,Sr)TiO3 Films for Gigabit DRAM

著者名:

Laibowitz, R. B.

さらに 6 件

掲載資料名:

Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

493

発行年:

1998

開始ページ:

33

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993983 [1558993983]

言語:

英語

請求記号:

M23500/493

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018455
シリーズID:	PA00000011
会議名:	Symposium on ferroelectric thin films
回次:	6th
会議開催地:	Boston, MA, USA
会議開催年:	1997.11.30-1997.12.04

類似資料:

1 国際会議録 Nonlinear Dielectric Relaxation of Mn Doped Polycrystalline (Ba,Sr)TiO3 Thin Films Over the Temperature Range of 4.2-473 K Baniecki, J. B., Laibowitz, R. B., Shaw, T. M., Duncombe, P. R., Kotecki, D. E., Shen, H., Lian, J., Ma, Q. Y. MRS - Materials Research Society	7 国際会議録 Effect of MOCVD Process On Texture And Dielectrical Properties of (BA, SR)TIO3 Thin Films Lian, J., Laibowitz, R., Seanger, K., Shaw, T., Athvale, S., Cottrell, E. Electrochemical Society
2 国際会議録 Electrical and Microwave Properties of Mn-Implanted (Ba,Sr)TiO3 Thin Films Baniecki, J. D., Laibowitz, R. B., Shaw, T. M., Duncombe, P. R., Neumayer, D. A., Copel, M., Kotecki, D. E., Shen, H., … MRS - Materials Research Society	8 国際会議録 *Chemical vapor deposition and electrode technologies for (Ba,Sr) TiO3 capacitor used in gigabit DRAM Eguchi, K., Hieda, K., Nakahira, J., Kiyotoshi, M., Nakabayashi, M., Yamazaki, S., Izuha, M., Aoyama, T., Tsunoda, K., … MRS-Materials Research Society
3 国際会議録 The Effect of Forming Gas Annealing on Pt/(Ba,Sr)Tio3/Pt Thin Film Capacitors for Future DRAM Applications: Electrical Properties and Degradation Mechanisms Baniecki, J.D., Parks, C., Laibowitz, R.B., Shaw, T.M., Lian, J. Materials Research Society	9 国際会議録 Organometallic Chemical Vapor Deposition of (BaSr)TiO3 Ferroelectric Thin Films Wessels, B.W., Wills, L.A., Lu, H.A., Gilbert, S.R., Neumayer, D.A., Schulz, D.L., Marks, T.J. Electrochemical Society
4 国際会議録 Low-temperature hydrogen induced degradation of (Ba,Sr) TiO3 thin film capacitors Baniecki, J. D., Parks, C., Laibowitz, R. B., Shaw, T. M., Lian, J., Costrini, G. MRS-Materials Research Society	10 国際会議録 TiO2 films for user-controlled photochromic applications Gudgel,T.J., Cronin,J.P., Kennedy,S.R., Uhlmann,D.R. SPIE - The International Society for Optical Engineering
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