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Synchrotron White Beam Topography Studies of Residual Stress in SiC Single Crystal Wafers With Epitaxial Thin Films

著者名:
Huang, W.
Wang, Q.
Dudley, M.
Chiang, F. P.
Parsons, J.
Fazi, C.
さらに 1 件
掲載資料名:
Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
399
発行年:
1996
開始ページ:
425
出版情報:
Pittsburgh, Pennsylvania: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993020 [1558993029]
言語:
英語
請求記号:
M23500/399
資料種別:
国際会議録

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