Simulation of Uniformity and Lifetime Effects in Collimated Sputtering

Simulation of Uniformity and Lifetime Effects in Collimated Sputtering

著者名:

Tait, R. N.

掲載資料名:

Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

389

発行年:

1995

開始ページ:

373

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992924 [1558992928]

言語:

英語

請求記号:

M23500/389

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018445
シリーズID:	PA00000011
会議名:	Symposium on modeling and simulation of thin-film processing
回次:	1995
会議開催地:	San Francisco, CA, USA
会議開催年:	1995.04.17-1995.04.20

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