LOW TEMPERATURE MOCVD OF ORIENTED PbTiO3 FILMS ON Si(100)

LOW TEMPERATURE MOCVD OF ORIENTED PbTiO3 FILMS ON Si(100)

著者名:

掲載資料名:

Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

335

発行年:

1994

開始ページ:

35

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992344 [1558992340]

言語:

英語

請求記号:

M23500/335

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018441
シリーズID:	PA00000011
会議名:	Symposium on metal-organic chemical vapor deposition of electronic ceramics
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.03

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