Correction method for radial effect caused by spin process

Correction method for radial effect caused by spin process

著者名:

Kim,J.-M. ( Samsung Electronics Co.Ltd. )
Choi,S.-W.
Cha,B.-C.
Yoon,H.-S.
Sohn,J.-M.

掲載資料名:

16th Annual BACUS Symposium on Photomask Technology and Management

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2884

発行年:

1996

開始ページ:

466

終了ページ:

472

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422828 [0819422827]

言語:

英語

請求記号:

P63600/2884

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018423
シリーズID:	PA00000029
会議名:	SPIE Photomask Technology : Annual Symposium on Photomask Technology and Management
回次:	1996 : 16th
会議開催地:	Redwood City, California, USA
会議開催年:	1996.09.18-1996.09.20

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2 国際会議録 Evaluation of the practical use of GHOST technique for various e-beam resists Cha,B.-C., Kim,J.-M., Kim,B.-G., Choi,S.-W., Yoon,H.-S., Sohn,J.-M. SPIE - The International Society for Optical Engineering	8 国際会議録 Impact of mask CD error on wafer CD error at low-k1 photolithography Kim, B. -G., Choi, S. -W., Choi, J. -H., Chun, C. -U., Yoon, H. -S., Sohn, J. -M. SPIE - The International Society of Optical Engineering
3 国際会議録 Resolution improvement of chemical-amplification resist using process-induced effect correction Choi,J.-H., Kim,C.-Y., Lee,J.-Y., Moon,S.-W., Choi,S.-W., Han,W.-S., Sohn,J.-M. SPIE-The International Society for Optical Engineering	9 国際会議録 Proximity effect correction optimization considering fogging and loading effects compensation Yang, S.-H., Choi, Y.-H., Park, J.-R., Kim, Y.H., Choi, S.-W., Sohn, J.-M. SPIE-The International Society for Optical Engineering
4 国際会議録 Analysis of photomask CD errors depending on development methods Moon,S.-Y., Ki,W.-T., Cha,B.-C., Choi,S.-W., Yoon,H.-S., Sohn,J.-M. SPIE - The International Society for Optical Engineering	10 国際会議録 Dose latitude dependency on resist contrast in e-beam mask lithography Cha,B.-C., Moon,S.-Y., Ki,W.-T., Yang,S.-H., Choi,S.-W., Han,W.-S., Yoon,H.-S., Sohn,J.-M. SPIE - The International Society for Optical Engineering
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