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FIB repair of opaque defects for 64-Mb-DRAM-level binary masks

著者名:
Lee,K.H. ( Samsung Electronics Co.Ltd. )
Cho,H.K.
Park,J.H.
Kim,Y.H.
Yoon,H.S.
Sohn,J.M.
さらに 1 件
掲載資料名:
16th Annual BACUS Symposium on Photomask Technology and Management
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2884
発行年:
1996
開始ページ:
442
終了ページ:
453
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422828 [0819422827]
言語:
英語
請求記号:
P63600/2884
資料種別:
国際会議録

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