Performance of gas-assisted FIB repair for opaque defects
- 著者名:
Satoh,Y. ( Dai Nippon Printing Co.,Ltd. ) Nakamura,H. Fujikawa,J. Tsuchiya,K. Noguchi,S. Aita,K. Yasaka,A. - 掲載資料名:
- 16th Annual BACUS Symposium on Photomask Technology and Management
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2884
- 発行年:
- 1996
- 開始ページ:
- 124
- 終了ページ:
- 137
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422828 [0819422827]
- 言語:
- 英語
- 請求記号:
- P63600/2884
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
国際会議録
Development of focused ion-beam repair for opaque defects on MoSi-based attenuated phase-shift mask
SPIE - The International Society of Optical Engineering |