Scaling self-aligned contacts for 0.25ｦﾌ m and below

Scaling self-aligned contacts for 0.25ｦﾌ m and below

著者名:

Perera,A. ( Motorola )

Pfiester,J.R. ( Hewlett-Packard Co. )

Lii,T. ( Motorola )

Feng,C. ( Semiconductor Technology Lab. )

Bhat,M. ( Motorola )

Dao,T. ( Semiconductor Technology Lab. )

Molloy,J. ( Semiconductor Technology Lab. )

Blackwell,M. ( Motorola )

J. Cecil, ( Motorola )

さらに 4 件

掲載資料名:

Microelectronic Device Technology : 1-2 October 1997, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3212

発行年:

1997

開始ページ:

171

終了ページ:

175

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426444 [081942644X]

言語:

英語

請求記号:

P63600/3212

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018328
シリーズID:	PA00000029
会議名:	Microelectronic Manufacturing : Microelectronic Device Technology
回次:	1997
会議開催地:	Austin, TX, USA
会議開催年:	1997.10.01-1997.10.02

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