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Characterization and application of jet-printed thin PZT layers for actuation of MEMS

著者名:
  • Schroth,A. ( Mechanical Engineering Lab. (Japan) )
  • Ichiki,M. ( Mechanical Engineering Lab. (Japan) )
  • Maeda,R. ( Mechanical Engineering Lab. (Japan) )
  • Akedo,J. ( Mechanical Engineering Lab. (Japan) )
掲載資料名:
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3242
発行年:
1997
開始ページ:
380
終了ページ:
387
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426802 [0819426806]
言語:
英語
請求記号:
P63600/3242
資料種別:
国際会議録

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