New developments of pulsed-laser deposition process (Invited Paper)
- 著者名:
- Okada,T. ( Kyushu Univ.(Japan) )
- Nakata,Y. ( Kyushu Univ.(Japan) )
- Muramoto,J. ( Kyushu Univ.(Japan) )
- Maeda,M. ( Kyushu Univ.(Japan) )
- 掲載資料名:
- Laser Applications in Microelectronic and Optoelectronic Manufacturing III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3274
- 発行年:
- 1998
- 開始ページ:
- 246
- 終了ページ:
- 254
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427137 [0819427136]
- 言語:
- 英語
- 請求記号:
- P63600/3274
- 資料種別:
- 国際会議録
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