Optimization of high-power excimer laser for TFT annealing

Optimization of high-power excimer laser for TFT annealing

著者名:

Endert,H. ( Lambda Physik,Inc. )

Becker-de Mos,B. ( Lambda Physik Lasertechnik GmbH (Germany) )

Stamm,U. ( Lambda Physik Lasertechnik GmbH (Germany) )

Borneis,S. ( Lambda Physik Lasertechnik GmbH (Germany) )

Voｦﾂ,F. ( Lambda Physik Lasertechnik GmbH (Germany) )

Basting,D. ( Lambda Physik Lasertechnik GmbH (Germany) )

さらに 1 件

掲載資料名:

High-Power Laser Ablation

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3343

発行年:

1998

巻:

Part 1

開始ページ:

432

終了ページ:

439

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427908 [081942790X]

言語:

英語

請求記号:

P63600/3343

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018316
シリーズID:	PA00000029
会議名:	High-Power Laser Ablation
回次:	1998
会議開催地:	Santa Fe, NM, USA
会議開催年:	1998.04.27-1998.04.30

類似資料:

1 国際会議録 Optimization of 200-W excimer laser for TFT annealing Pfeufer,V., VoB,F., Mos,B.Becker-de, Stamm,U., Endert,H., Basting,D. SPIE-The International Society for Optical Engineering	7 国際会議録 High-average-power Ce:LiCaF laser at 1-KHz repetition rate tunable from 280 nm to 315 nm Govorkov,S., Wieｦﾂner,A., Genter,P., Stamm,U., Zschocke,W., Schroder,T, Basting,D. SPIE-The International Society for Optical Engineering
2 国際会議録 High-power excimer lasers for high-throughput poly-Si annealing Fiebig,M., Osmanov,R., Stamm,U., F.Voｦﾂ, Oesterlin,P., Kobayashi,N., Fechner,B., Uzuka,L. SPIE - The International Society for Optical Engineering	8 国際会議録 High-average-power excimer lasers Borisov,V.M., Demin,A.I., Khristoforov,O.B., Kirykhin,Yu.B., Vinokhodov,A., Vodchits,V., Basting,D., Stamm,U., Voss,F., … SPIE - The International Society for Optical Engineering
3 国際会議録 Excimer laser for 157-nm lithography Stamm,U., Bragin,I., Govorkov,S.V., Kleinschmidt,J., Patzel,R., Slobodtchikov,E., Vogler,K., F.Voｦﾂ, Basting,D. SPIE - The International Society for Optical Engineering	9 国際会議録 Excimer laser:innovation in industrial material processing Basting,D., Endert,H., Patzel,R., Nikolaus,B.K. SPIE-The International Society for Optical Engineering
4 国際会議録 Recent developments of industrial excimer laser technology Stamm,U., Patzel,R., Bragin,I., Kleinschmidt,J., Voｦﾂ,F., Basting,D. SPIE-The International Society for Optical Engineering	10 国際会議録 History and future prospects of excimer lasers Basting,D., Pippert,K.D., Stamm,U. SPIE-The International Society for Optical Engineering
5 国際会議録 Excimer lasers in manufacturing Endert,H., Patzel,R., Stamm,U., Basting,D. SPIE-The International Society for Optical Engineering	11 国際会議録 Optimization of 200-W excimer laser for TFT annealing(Invited Paper) Pippert,K.-D., Staudt,W.F., Pfeufer,V. SPIE-The International Society for Optical Engineering
6 国際会議録 Excimer lasers for material ablation cross the 1.5kHz mark Patzel,R., Stamm,U., Bragin,I., VoB,F., Nikolaus,B.K., Endert,H., Basting,D. SPIE-The International Society for Optical Engineering	12 国際会議録 High-repetition-rate excimer lasers for DUV Lithography Stamm,U., Paetzel,R., Bragin,I., Berger,V., Klaft,I., Kleinschmidt,J., Osmanov,R., Schroeder,T., Vogler,K., Zschocke,W., … SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12