Linkage design effect on the reliability of surface-micromachined microengines driving a load
- 著者名:
Tanner,D.M. ( Sandia National Labs. ) Peterson,K.A. ( Sandia National Labs. ) Irwin,L.A. ( Sandia National Labs. ) Tangyunyong,P. ( Sandia National Labs. ) Miller,W.M. ( Sandia National Labs. ) Eaton,W.P. ( Sandia National Labs. ) Smith,N.F. ( Sandia National Labs. ) Rodgers,M.S. ( Sandia National Labs. ) - 掲載資料名:
- Materials and Device Characterization in Micromachining
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3512
- 発行年:
- 1998
- 開始ページ:
- 215
- 終了ページ:
- 226
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429711 [0819429716]
- 言語:
- 英語
- 請求記号:
- P63600/3512
- 資料種別:
- 国際会議録
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Planar surface-micromachined pressure sensor with a subsurface,embedded reference pressure cavity
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