RECENTDEVELOPMENTS IN THE EPITAXIAL GROWTH OF TRANSITION METAL SILICIDES ON SILICON

RECENTDEVELOPMENTS IN THE EPITAXIAL GROWTH OF TRANSITION METAL SILICIDES ON SILICON

著者名:

掲載資料名:

Heterostructures on silicon : one step further with silicon

シリーズ名:

NATO ASI series. Series E, Applied sciences

シリーズ巻号:

160

発行年:

1989

開始ページ:

231

終了ページ:

238

総ページ数:

8

出版情報:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792301240 [0792301242]

言語:

英語

請求記号:

N11482/160

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018242
シリーズID:	PA00000018
会議名:	NATO Advanced Research Workshop on Heterostructures on Silicon
回次:	1988
会議開催地:	Cargèse, Corsica, France
会議開催年:	1988.05.15-1988.05.20

類似資料:

1 国際会議録 *EPITAXIAL GROWTH OF TRANSITION METAL SILICIDES ON SILICON Chen, L.J., Cheng, H.C., Lin, W.T. Materials Research Society	7 国際会議録 TRANSITION METAL CONTAMINATION OF EPITAXIAL SILICON Scott, M. P., Caubin, L., Chen, D. C., Weber, E. R., Rose, J., Tucker, T. Materials Research Society
2 国際会議録 EPITAXIAL GROWTH OF REFRACTORY SILICIDES ON SILICON Chen, L. J., Cheng, H. C., Lin, W. T., Chou, L. J., Fung, M. S. Materials Research Society	8 国際会議録 NUCLEATION AND GROWTH OF ULTRATHIN EPITAXIAL METAL SILICIDES ON SILICON Batstone, J. L., Tung, R. T., Phillips, Julia M., Gibson, J. M. Materials Research Society
3 国際会議録 EPITAXIAL GROWTH OF RARE EARTH SILICIDES ON (111)Si Lee, T. L., Sue, W. D., Lin, J. H., Luo, C. H., Chen, L. J. MRS - Materials Research Society	9 国際会議録 Metal Silicide Nanowires L. Chen, W. Wu, H.C. Hsu, S.Y. Chen, Y.L. Chueh Electrochemical Society
4 国際会議録 SILICIDE FORMATION BY RAPID THERMAL PROCESSING Chen, L. J., Lur, W., Chen, J. F., Lee, T. L., Liang, J. M. MRS - Materials Research Society	10 国際会議録 Nanostructures on Epitaxial SiGe Films in Silicon Chen, L J., Wu, W. W., Lee, S. W., Chen, H., Yang, T. H. Electrochemical Society
5 国際会議録 EPITAXIAL GROWTH OF NiSi2 AND GoSi2 ON LATERALLY CONFINED SILICON BY RAPID THERMAL ANNEALING Hsu, H. F., Chu, J. J,., Chen, L. J. Materials Research Society	11 国際会議録 Epitaxial Growth of Diamond Films for Electronic Applications Chen, K.H., Wu, J.Y., Chen, L.C., Juan, C.C., Hsu, T. Electrochemical Society
6 国際会議録 EPITAXIAL GROWTH OF PLATINUM-GROUP METAL SILICIDES ON (111) Si Chang, Y.S., Chu, J.J., Chen, L.J. Materials Research Society	12 国際会議録 Metal characterization and process enhancement techniques for photolithographic materials Ko, F.-H., Chen, H.-L., Hsu, C.-C., Chu, T.-C. SPIE-The International Society for Optical Engineering

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