Some Considerations of the Kinetics and Thermodynamics of CVD Processes

Some Considerations of the Kinetics and Thermodynamics of CVD Processes

著者名:

掲載資料名:

Mechanisms of reactions of organometallic compounds with surfaces

シリーズ名:

NATO ASI series. Series B, Physics

シリーズ巻号:

198

発行年:

1989

開始ページ:

87

終了ページ:

96

総ページ数:

10

出版情報:

New York: Plenum Press

ISBN:

9780306432057 [0306432056]

言語:

英語

請求記号:

N11479/198

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018154
シリーズID:	PA00000015
会議名:	NATO Advanced Research Workshop on the Mechanisms of Reactions of Organometallic Compounds with Surfaces
回次:	1988
会議開催地:	Fife, Scotland, UK
会議開催年:	1988.06.22-1988.06.24

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