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Integration of MEMS devices

著者名:
French,P.J. ( Delft Univ.of Technology )  
掲載資料名:
Education in microelectronics and MEMS : 28-29 October 1999, Royal Pines Resort, Queensland, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3894
発行年:
1999
開始ページ:
55
終了ページ:
64
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434951 [0819434957]
言語:
英語
請求記号:
P63600/3894
資料種別:
国際会議録

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