Ion beam sputter deposition of TiNi shape memory alloy thin films
- 著者名:
- Davies,S.T. ( Univ.of Warwick )
- Tsuchiya,K.
- 掲載資料名:
- Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3874
- 発行年:
- 1999
- 開始ページ:
- 165
- 終了ページ:
- 172
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434715 [081943471X]
- 言語:
- 英語
- 請求記号:
- P63600/3874
- 資料種別:
- 国際会議録
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3
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Growth and characterization of shape memory alloy thin films for micropositioning and microactuation
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