W-coating for MEMS
- 著者名:
- Mani,S.S. ( Sandia National Labs. )
- Fleming,J.G.
- Sniegowski,J.J.
- 掲載資料名:
- Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3874
- 発行年:
- 1999
- 開始ページ:
- 150
- 終了ページ:
- 157
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434715 [081943471X]
- 言語:
- 英語
- 請求記号:
- P63600/3874
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
国際会議録
Development, test, and evaluation of MEMS micromirrors for free-space optical communications
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |