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Reproducibility data on SUMMiT

著者名:
Limary,S. ( Sandia National Labs. )
Stewart,H.
Irwin,L.W.
McBrayer,J.
Sniegowski,J.J.
Montague,S.
Smith,J.H.
Boer,M.P.de
Jakubczak,J.F.
さらに 4 件
掲載資料名:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3874
発行年:
1999
開始ページ:
102
終了ページ:
112
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
言語:
英語
請求記号:
P63600/3874
資料種別:
国際会議録

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