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Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

著者名:
Pelt,J.S. ( Florida A&M Univ.and Florida State Univ )
Ramsey,M.E.
Magana,R.,Jr.
Poindexter,E.,Jr.
Boer,M.P.de
LaVan,D.A.
Dugger,M.T.
Smith,J.H.
Durbin,S.M.
さらに 4 件
掲載資料名:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3874
発行年:
1999
開始ページ:
76
終了ページ:
84
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
言語:
英語
請求記号:
P63600/3874
資料種別:
国際会議録

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