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Innovations in molding technologies for microfabrication

著者名:
Benzler,T. ( Forschungszentrum Karlsruhe GmbH )
Piotter,V.
Hanemann,T.
Mueller,K.
Norajitra,P.
Ruprecht,R.
Hausselt,J.H.
さらに 2 件
掲載資料名:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3874
発行年:
1999
開始ページ:
53
終了ページ:
60
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
言語:
英語
請求記号:
P63600/3874
資料種別:
国際会議録

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