LIGA:metals,plastics,and ceramics
- 著者名:
Hruby,J.M. ( Sandia National Labs. ) Griffiths,S.K. Domeier,L.A. Morales,A.M. Boehme,D.R. Bankert,M.A. Bonivert,W.D. Hachmann,J.T. Skala,D.M. Ting,A. - 掲載資料名:
- Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3874
- 発行年:
- 1999
- 開始ページ:
- 32
- 終了ページ:
- 43
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434715 [081943471X]
- 言語:
- 英語
- 請求記号:
- P63600/3874
- 資料種別:
- 国際会議録
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6
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Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques
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