Assessment of a hypothetical road map that extends optical lithography through the 70-nm technology node
- 著者名:
Petersen,J.S. ( Petersen Advanced Lithography ) McCallum,M. Kachwala,N. Socha,R.J. Chen,J.F. Laidig,T.L. Smith,B.W. Gordon,R.L. Mack,C.A. - 掲載資料名:
- Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3741
- 発行年:
- 1999
- 開始ページ:
- 73
- 終了ページ:
- 89
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432216 [0819432210]
- 言語:
- 英語
- 請求記号:
- P63600/3741
- 資料種別:
- 国際会議録
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SPIE - The International Society for Optical Engineering |
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